8inch SiC productio gradus laganum 4H-N SiC subiectum
Sequens tabula indicat speciem unctae nostrae 8inch SiC.
8inch N-type SiC DSP Specs | |||||
Numerus | Item | Unitas | Fabricatio | Inquisitionis | phantasma |
I: parametri | |||||
1.1 | polytypum | -- | 4H | 4H | 4H |
1.2 | superficies naturae | ° | <11-20>4±0.5 | <11-20>4±0.5 | <11-20>4±0.5 |
II: Electrical parametri | |||||
2.1 | dopant | -- | n-genus Nitrogenium | n-genus Nitrogenium | n-genus Nitrogenium |
2.2 | resistivity | olim ·cm | 0.015~0.025 | 0.01~0.03 | NA |
III, Mechanica parametri | |||||
3.1 | diametri | mm | 200±0.2 | 200±0.2 | 200±0.2 |
3.2 | crassitudine | μm | 500±25 | 500±25 | 500±25 |
3.3 | SCARIFICATIO orientationis | ° | [1- 100]±5 | [1- 100]±5 | [1- 100]±5 |
3.4 | SCARIFICATIO Profundum | mm | 1~1.5 | 1~1.5 | 1~1.5 |
3.5 | LTV | μm | ≤5(10mm*10mm) | ≤5(10mm*10mm) | ≤10(10mm*10mm) |
3.6 | TTV | μm | ≤10 | ≤10 | ≤15 |
3.7 | Arcum | μm | -25~25 | -45~45 | -65~65 |
3.8 | Warp | μm | ≤30 | ≤50 | ≤70 |
3.9 | AFM | nm | Ra≤0.2 | Ra≤0.2 | Ra≤0.2 |
4: Stucture | |||||
4.1 | micropipe density | ea/cm2 | ≤2 | ≤10 | ≤50 |
4.2 | metallum contentus | atomi/cm2 | ≤1E11 | ≤1E11 | NA |
4.3 | TSD | ea/cm2 | ≤500 | ≤1000 | NA |
4.4 | BPD | ea/cm2 | ≤2000 | ≤5000 | NA |
4.5 | TED | ea/cm2 | ≤7000 | ≤10000 | NA |
5.Front qualis | |||||
5.1 | front | -- | Si | Si | Si |
5.2 | Superficiem metam | -- | Si-face CMP | Si-face CMP | Si-face CMP |
5.3 | particula | ea / laganum | ≤100(size≥0.3μm) | NA | NA |
5.4 | scalpere | ea / laganum | ≤5,Summa Longitudo 200mm | NA | NA |
5.5 | Acies eu / indents / rimis / sordibus / contagione | -- | Nullus | Nullus | NA |
5.6 | Polytype areis | -- | Nullus | Area ≤10% | Area ≤30% |
5.7 | ante notati | -- | Nullus | Nullus | Nullus |
VI: Back qualis | |||||
6.1 | metam retro | -- | C-face MP | C-face MP | C-face MP |
6.2 | scalpere | mm | NA | NA | NA |
6.3 | Retro defectus in ore eu / indents | -- | Nullus | Nullus | NA |
6.4 | Retro asperitatem | nm | Ra≤5 | Ra≤5 | Ra≤5 |
6.5 | Retro vestigium | -- | SCARIFICATIO | SCARIFICATIO | SCARIFICATIO |
7: ore | |||||
7.1 | acies | -- | Chamfer | Chamfer | Chamfer |
VIII: Package | |||||
8.1 | packaging | -- | Epi-paratum cum vacuo packaging | Epi-paratum cum vacuo packaging | Epi-paratum cum vacuo packaging |
8.2 | packaging | -- | Multi laganum Paperback packaging | Multi laganum Paperback packaging | Multi laganum Paperback packaging |
Detailed Diagram
![asd (1)](http://www.xkh-semitech.com/uploads/asd-112.jpg)
![asd (2)](http://www.xkh-semitech.com/uploads/asd-211.jpg)
![asd (3)](http://www.xkh-semitech.com/uploads/asd-37.jpg)
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