4 inch SiC Wafers 6H Semi-Insulating SiC Substrat primum, investigationis et gradus phantastici.

Brevis descriptio:

Semi-insulata carbidi pii substrato formatur secando, stridando, poliendo, purgando et aliis technologiam expediendis post incrementum semi-insulatae pii carbidi crystalli. Accensus vel multilayer cristallus iacuit crevit in subiecto, quod occurrit quale requisita ut epitaxy, et tunc proin RF fabrica fit componendo ambitum consilio et packaging. Praesto ut 2inch 3inch 4incgh 6inch 8 inch industrialis, investigatio et probatio gradus semi-insulati carbidi pii unico crystallo substrato.


Product Detail

Product Tags

Product Specification

Gradus

Nulla MPD Productio Grade (Z Grade)

Latin Production Grade (P Grade)

Donec Grade (D Grade)

 
Diameter 99.5 mm~100.0 mm  
  4H-SI 500 μm±20 μm

500 μm±25 μm

 
Azymum propensionis  

 

Ab axe : 4.0° versus < 1120 > ±0.5° pro 4H-N, in axe : <0001>±0.5° pro 4H-SI.

 
  4H-SI

≤1cm-2

≤5 cm-2

≤15 cm-2

 
  4H-SI

≥1E9 Ω·cm

≥1E5 Ω·cm

 
Prima Flat propensionis

{10-10} ±5.0°

 
Prima Flat Longitudo 32.5 mm±2.0 mm  
Secundarium Flat Longitudo 18.0 mm±2.0 mm  
Secundarium Flat propensionis

Pii os sursum: 90° CW. ab Prima plana ±5.0°

 
Ore exclusio

3 mm

 
LTV/TTV/Bow/Warp ≤3 μm/≤5 μm/≤15 μm/≤30 μm ≤10 μm/≤15 μm/≤25 μm/≤40 μm  
 

asperitas

C face

    Polonica Ra≤1 nm

Si face

CMP Ra≤0.2 nm    

Ra≤0.5 nm

Ora Cracks per summam intensionem lux

Nullus

Cumulativus longitudinis ≤ 10 mm longus, solitarius

length≤2 mm

 
Hex Plates per summam intensionem lux Cumulativo area ≤0.05% Cumulativo area ≤0.1%  
Polytype Areas per intensionem lux

Nullus

Cumulativo area≤3%  
Visual Carbon Inclusions Cumulativo area ≤0.05% Cumulativo area ≤3%  
Pii Superficies scalpit per summam intensionem lux  

Nullus

Cumulativo lagano longitudo≤1*  
Ora Chips High per intensionem lux Nemo permissus ≥0.2 mm latitudine et altitudine 5 datum, ≤1 mm  
Pii superficies contagione per summam intensionem

Nullus

 
Packaging

Multi laganum Cassette aut unum laganum continens

 

Detailed Diagram

Detailed Diagram (1)
Detailed Diagram (2)

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