4 inch SiC Wafers 6H Semi-Insulating SiC Substrat primum, investigationis et gradus phantastici.

4 inch SiC Wafers 6H Semi-insulans SiC Substrat primum, investigationis, et dummy gradus Featured Image

Description:

Semi-insulata carbidi pii substrato formatur secando, stridando, poliendo, purgando et aliis technologiam expediendis post incrementum semi-insulatae pii carbidi crystalli.Accensus vel multilayer cristallus iacuit crevit in subiecto, quod occurrit quale requisita ut epitaxy, et tunc proin RF fabrica fit componendo ambitum consilio et packaging.Praesto ut 2inch 3inch 4incgh 6inch 8 inch industrialis, investigatio et probatio gradus semi-insulati carbidi pii unico crystallo substrato.

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Product Detail

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Product Specification

Gradus			Nulla MPD Productio Grade (Z Grade)			Latin Production Grade (P Grade)		Donec Grade (D Grade)
Diameter			99.5 mm~100.0 mm
	4H-SI		500 μm±20 μm			500 μm±25 μm
Azymum propensionis			Axis : 4.0° versus < 1120 > ±0.5° pro 4H-N, in axe : <0001>±0.5° pro 4H-SI.
	4H-SI		≤1cm^-2			≤5 cm^-2		≤15 cm^-2
	4H-SI		≥1E9 Ω·cm					≥1E5 Ω·cm
Prima plana propensionis		{10-10} ±5.0°
Prima Flat Longitudo		32.5 mm±2.0 mm
Secundarium Flat Longitudo		18.0 mm±2.0 mm
Secundarium Flat propensionis		Pii os sursum: 90° CW.ab Prima plana ±5.0°
Ore exclusio		3 mm
LTV/TTV/Bow/Warp		≤3 μm/≤5 μm/≤15 μm/≤30 μm						≤10 μm/≤15 μm/≤25 μm/≤40 μm
asperitas			C face				Polonica		Ra≤1 nm
			Si face	CMP	Ra≤0.2 nm					Ra≤0.5 nm
Ora Cracks per summam intensionem lux		Nullus						Cumulativus longitudinis ≤ 10 mm longus, solitarius length≤2 mm
Hex Plates per summam intensionem lux		Cumulativo area ≤0.05%						Cumulativo area ≤0.1%
Polytype Areas per intensionem lux		Nullus						Cumulativo area≤3%
Visual Carbon Inclusions		Cumulativo area ≤0.05%						Cumulativo area ≤3%
Pii Superficiem scalpit per summam intensionem lux		Nullus						Cumulativo longitudo lagana lagana
Ora Chips High per intensionem lux		Nemo permissus ≥0.2 mm latitudine et altitudine						5 datum, ≤1 mm
Pii superficies contagione per summam intensionem		Nullus
Packaging		Multi laganum Cassette aut unum laganum continens