8Inch 200mm 4H-N SiC Wafer Conductive phantasma investigationis gradus
Ob singulares proprietates physicas et electronicas, 200mm laganum semiconductorium SiC materia adhibita est ad efficiendum excelsum perficientur, summus temperatura, radiorum resistentia, et electronicarum frequentia. 8inch SiC pretium subiectae paulatim decrescit sicut technicae artis progressus ac postulatio augetur. Progressiones technologiae recentes ducunt ad productionem scalae fabricationis 200mm laganae SiC. Praecipua commoditates materiae semiconductoris SiC lagani prae lagana Si et GaAs: agri electrica robur 4H-SiC in naufragii NIVIS CASUS plus est quam ordo magnitudinis altior quam valores respondentes Si et GaAs. Hoc minuit notabilem in statu resistivity Ron. Resistebilitas in statu humilis, cum densitate ac conductivity scelerisque currenti coniuncta, minimum usum pro viribus cogitationibus mori permittit. Princeps scelerisque conductivity SiC scelerisque resistentiam chip reducet. Proprietates electronicarum machinarum quae lagana SiC fundatae sunt valde stabilis super tempus et in stabilis temperatura, quae altam firmitatem fructuum praestat. Carbida siliconis duriori radiorum maxime repugnat quae electronicas proprietates chipi non detrahit. Princeps temperatus operandi limitans crystalli (plus 6000C) permittit te efficax machinas creare pro duras condiciones operativas et speciales applicationes. Nunc, massam parvam 200mmSiC laganam constanter et continue praebere possumus et aliquam stirpem in horreis habere.
Specification
Numerus | Item | Unitas | Productio | Inquisitionis | phantasma |
1. Morbi | |||||
1.1 | polytypum | -- | 4H | 4H | 4H |
1.2 | superficies naturae | ° | <11-20>4±0.5 | <11-20>4±0.5 | <11-20>4±0.5 |
2. parametri Electrical | |||||
2.1 | dopant | -- | n-genus Nitrogenium | n-genus Nitrogenium | n-genus Nitrogenium |
2.2 | resistivity | olim ·cm | 0.015~0.025 | 0.01~0.03 | NA |
Mechanica 3. parametri | |||||
3.1 | diametri | mm | 200±0.2 | 200±0.2 | 200±0.2 |
3.2 | crassitudine | μm | 500±25 | 500±25 | 500±25 |
3.3 | SCARIFICATIO orientationis | ° | [1- 100]±5 | [1- 100]±5 | [1- 100]±5 |
3.4 | SCARIFICATIO Profundum | mm | 1~1.5 | 1~1.5 | 1~1.5 |
3.5 | LTV | μm | ≤5(10mm*10mm) | ≤5(10mm*10mm) | ≤10(10mm*10mm) |
3.6 | TTV | μm | ≤10 | ≤10 | ≤15 |
3.7 | Arcum | μm | -25~25 | -45~45 | -65~65 |
3.8 | Warp | μm | ≤30 | ≤50 | ≤70 |
3.9 | AFM | nm | Ra≤0.2 | Ra≤0.2 | Ra≤0.2 |
4. Stucture | |||||
4.1 | micropipe density | ea/cm2 | ≤2 | ≤10 | ≤50 |
4.2 | metallum contentus | atomi/cm2 | ≤1E11 | ≤1E11 | NA |
4.3 | TSD | ea/cm2 | ≤500 | ≤1000 | NA |
4.4 | BPD | ea/cm2 | ≤2000 | ≤5000 | NA |
4.5 | TED | ea/cm2 | ≤7000 | ≤10000 | NA |
5. Positivum qualitatem | |||||
5.1 | front | -- | Si | Si | Si |
5.2 | Superficiem metam | -- | Si-face CMP | Si-face CMP | Si-face CMP |
5.3 | particula | ea / laganum | ≤100(size≥0.3μm) | NA | NA |
5.4 | scalpere | ea / laganum | ≤5,Summa Longitudo 200mm | NA | NA |
5.5 | Ore eu / indents / rimis / sordibus / contagione | -- | Nullus | Nullus | NA |
5.6 | Polytypus areis | -- | Nullus | Area ≤10% | Area ≤30% |
5.7 | ante notati | -- | Nullus | Nullus | Nullus |
6. Back qualis | |||||
6.1 | metam retro | -- | C-face MP | C-face MP | C-face MP |
6.2 | scalpere | mm | NA | NA | NA |
6.3 | Retro defectus in ore eu / indents | -- | Nullus | Nullus | NA |
6.4 | Retro asperitatem | nm | Ra≤5 | Ra≤5 | Ra≤5 |
6.5 | Retro vestigium | -- | SCARIFICATIO | SCARIFICATIO | SCARIFICATIO |
7. Edge | |||||
7.1 | ora | -- | Chamfer | Chamfer | Chamfer |
8. Package | |||||
8.1 | packaging | -- | Epi-paratum cum vacuum packaging | Epi-paratum cum vacuum packaging | Epi-paratum cum vacuum packaging |
8.2 | packaging | -- | Multi laganum Paperback packaging | Multi laganum Paperback packaging | Multi laganum Paperback packaging |
Detailed Diagram



